Journal
APPLIED PHYSICS LETTERS
Volume 82, Issue 17, Pages 2758-2760Publisher
AMER INST PHYSICS
DOI: 10.1063/1.1569987
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Femtosecond laser pulses are useful for laser microfabrication through multiphoton absorption. However, it is difficult to create interference of femtosecond pulses for the fabrication of periodic structures. In this letter, we report the fabrication of two-dimensional periodic structures by means of multibeam interference of femtosecond pulses. Scanning electron microscopy revealed a rod structure arranged into a square lattice. The possibility of controlling the period of the lattice, rod thickness, and rod shape were demonstrated. (C) 2003 American Institute of Physics.
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