Journal
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 653, Issue -, Pages 255-259Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.jallcom.2015.09.021
Keywords
TiO2 thin film; Gas sensor
Categories
Funding
- N5 Sensors
- Maryland Industrial Partnerships (MIPS) [5418]
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TiO2 thin film based, chemiresistive sensors for NO2 gas which operate at room temperature under ultraviolet (UV) illumination have been demonstrated in this work. The rf-sputter deposited and post-annealed TiO2 thin films have been characterized by atomic force microscopy, X-ray photoelectron spectroscopy, and X-ray diffraction to obtain surface morphology, chemical state, and crystal structure, respectively. UV-vis absorption spectroscopy and Tauc plots show the optical properties of the TiO2 films. Under UV illumination, the NO2 sensing performance of the TiO2 films shows a reversible change in resistance at room-temperature. The observed change in electrical resistivity can be explained by the modulation of surface-adsorbed oxygen. This work is the first demonstration of a facile TiO2 sensor for NO2 analyte that operates at room-temperature under UV illumination. (C) 2015 Elsevier B.V. All rights reserved.
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