Journal
APPLIED PHYSICS LETTERS
Volume 82, Issue 18, Pages 2993-2995Publisher
AMER INST PHYSICS
DOI: 10.1063/1.1569052
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The dielectric function of nanocrystalline silicon (nc-Si) with crystallite size in the range of 1 to 3 nm has been determined by spectroscopic ellipsometry in the range of 1.5 to 5.5 eV. A Tauc-Lorentz parameterization is used to model the nc-Si optical properties. The nc-Si dielectric function can be used to analyze nondestructively nc-Si thin films where nanocrystallites cannot be detected by x-ray diffraction and Raman spectroscopy. (C) 2003 American Institute of Physics.
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