Journal
SCIENCE
Volume 300, Issue 5623, Pages 1269-1272Publisher
AMER ASSOC ADVANCEMENT SCIENCE
DOI: 10.1126/science.1083212
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We report the fabrication of transparent field-effect transistors using a single-crystalline thin-film transparent oxide semiconductor, InGaO3(ZnO)(5), as an electron channel and amorphous hafnium oxide as a gate insulator. The device exhibits an on-to-off current ratio of similar to10(6) and a field-effect mobility of similar to80 square centimeters per volt per second at room temperature, with operation insensitive to visible light irradiation. The result provides a step toward the realization of transparent electronics for next-generation optoelectronics.
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