A MEMS piston-cylinder device actuated by combustion

Combustion measurement in a cylindrical micro combustor, the construction procedure and test run of a MEMS reciprocating device are described. The sizing of the MEMS device was based on the findings of combustion measurements. Thermodynamic analysis of the pressure measurement resulted in available work up to 2.4 Joules in a combustor height of 2 mm and more with combustion efficiency of 0.6similar to0.7. With combustor height less than 2 mm, combustion was incomplete due to excessive heat loss to the wall. In order to achieve the chamber height imposed by the combustion measurement, a fabrication process and wafer material that allow deeper etching was used.