Journal
MICROELECTRONIC ENGINEERING
Volume 67-8, Issue -, Pages 702-709Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/S0167-9317(03)00175-8
Keywords
self-assembled; spin coating; gold nanoparticles; rapid fabrication
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This paper reports the fabrication of self-assembled gold nanoparticles attached to 3-aminopropyltrimethoxysilane (APTMS) modified fused silica substrates by the spin coating method. With the spin coating method, the gold nanoparticles can be fabricated on fused silica substrates with highly packing density in a short processing time. Our results clearly demonstrate that the spin coating method takes advantages of shorter fabrication time, higher uniformity, and better reproducibility when compared with the traditional immersion method. (C) 2003 Elsevier Science B.V. All rights reserved.
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