Application of semiconductor micro- and nanotubes in biology

We developed a new technology for fabricating InGaAs/GaAs and GeSi/Si semiconductor micro- and nanoneedles, syringe for intracellular injections. Within this technology, a novel method for directional roll-up of strained heterostructures is proposed, which fits nicely into the well-established integrated-circuit technology. The. tubes obtained by this method are mechanically strong enough to many times puncture thick-walled plant cells, and they can be easily integrated into other semiconductor devices to form a lab-on-a-chip. (C) 2003 Elsevier Science B.V. All rights reserved.