Journal
OPTICS LETTERS
Volume 28, Issue 13, Pages 1144-1146Publisher
OPTICAL SOC AMER
DOI: 10.1364/OL.28.001144
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We show that three-dimensional micro-optical components can be embedded in a photosensitive glass by a femtosecond (fs) laser. After exposure to the tightly focused fs laser beam, latent images are written inside the sample. Modified regions are developed by a postbaking process and then preferentially etched away in a 10%-dilute solution of hydrofluoric acid. After this process, hollow internal structures are formed that act as a mirror and a beam splitter. Furthermore, we find that postannealing smoothes the surfaces of the fabricated hollow structures, resulting in great improvement of their optical properties. (C) 2003 Optical Society of America.
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