Journal
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
Volume 77, Issue 2, Pages 307-310Publisher
SPRINGER-VERLAG
DOI: 10.1007/s00339-003-2120-x
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Results of recent investigations on deep drilling of metals by femtosecond laser pulses are reported. At high laser fluences, well above the ablation threshold, femtosecond lasers can drill deep, high-quality holes in metals without any post-processing or special gas environment. It is shown that for high-quality drilling of metals, the following processes are important: (1) laser-induced optical breakdown of air containing metal vapor and small metal particles (debris) generated by multi-pulse femtosecond laser ablation, (2) transformation of laser pulses into light filaments, and (3) low-fluence finishing.
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