Journal
OPTICS LETTERS
Volume 28, Issue 14, Pages 1263-1265Publisher
OPTICAL SOC AMER
DOI: 10.1364/OL.28.001263
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We present modeling and experimental results from the use of a 1310-nm-wavelength through-wafer optical microprobe in conjunction with a microstructure grating to monitor the motion of a lateral comb resonator stage. The optical signal that results from shuttle interaction with the microprobe beam exhibits a peak-to-valley dynamic range that corresponds to 2-mum microstructure displacement, facilitating submicrometer positional resolution on digitization. This signal was used to achieve microstructure positional feedback and effective microsystem model parameter extraction, which are essential for structure control and model-based fault detection. (C) 2003 Optical Society of America.
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