A hygrometer comprising a porous silicon humidity sensor with phase-detection electronics

A novel hygrometer is presented, comprising a capacitive humidity sensor with a porous silicon (PS) dielectric and electronics. The adsorption of water vapor by the PS layer leading to change of its effective dielectric constant is modeled with an effective medium approximation (EMA). A simple, but precise, phasesensitive electronic circuit has been developed. This detects any change of phase of a sinusoidal signal transmitted through the PS dielectric and correlates to ambient humidity. It is outlined how the nonlinear response of the sensor is compensated through piecewise linearization. The sensor is tested in combination with the phase detection circuitry. Excellent linearity over the entire range of relative humidity is achieved. Experimental results show a resolution better than 0.1% and an accuracy of 2% (near the transition region) and better than 0.1% (otherwise). The response time is less than 10 s with good stability.