Antenna-coupled VOx thin-film microbolometer array

Two-dimensional arrays of log-periodic antenna-coupled microbolometers were fabricated using VOx and Nb thin films as bolometric materials, which have different temperature coefficients of resistance. Noise, response, and angular characteristics of both types of microbolometer arrays were measured and compared. VOx-based devices presented a 4.5X better response and 5.5X better signal-to-noise ratio than Nb-based devices. Radiation patterns show that a further increase in response can be obtained by better matching the VOx bolometer to the antenna elements. (C) 2003 Wiley Periodicals, Inc.