Journal
JOURNAL OF PHYSICS-CONDENSED MATTER
Volume 15, Issue 30, Pages L475-L482Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0953-8984/15/30/102
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We report on the growth of single cubic-phase MgZnO thin films by reactive electron beam evaporation on sapphire substrates. A detailed theoretical procedure has been employed to analyse the transmission profile for information on composition non-uniformity, in addition to the exact determination of the band gap energy. The study of composition non-uniformity has been further extended to both the typically reported hexagonal and cubic MgZnO thin films. It is found that the composition non-uniformity strongly depends on the Mg content, which can be well explained by the ZnO-MgO phase diagram.
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