Ultraprecision diamond turning of glass with ultrasonic vibration

By applying ultrasonic vibration to a single-crystal diamond tool-tip, ductile machining of fused silica can be achieved even for 2 mum depth of cut. The increase in the critical depth of cut is significant and is a function of the ratio of vibration speed to cutting speed. Surface roughness Ra of 100 nm was obtained for up to 2 mum depth of cut.