Journal
MICROELECTRONIC ENGINEERING
Volume 69, Issue 2-4, Pages 587-593Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/S0167-9317(03)00350-2
Keywords
first principle calculations; ALD modeling; water adsorption; zirconia; hafnia
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First-principle calculations demonstrate that the adsorption energies of water on the (001) and ( 101) surfaces of tetragonal zirconia (t-ZrO2) and on the (001) surface of monoclinic zirconia. and hafnia (m-ZrO2 and m-HfO2) strongly depend on the surface hydroxylation degree. It is found that the fully hydroxylated t-ZrO2(001) surface undergoes a 2x2 reconstruction. The influence of surface dipole-dipole interactions on the calculated adsorption energy is discussed. (C) 2003 Elsevier B.V. All fights reserved.
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