4.5 Article

Imaging of piezoelectric activity in laser-ablated c-axis-oriented LiNbO3/ZnO thin film multilayer on glass using atomic force microscopy

Journal

JOURNAL OF MATERIALS RESEARCH
Volume 18, Issue 9, Pages 2025-2028

Publisher

MATERIALS RESEARCH SOCIETY
DOI: 10.1557/JMR.2003.0284

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A LiNbO3/ZnO multilayer with a preferred c-axis orientation normal to the plane of the substrate was grown on glass and SiO2/Si substrates by laser ablation. The piezoelectric activity in as-deposited films was demonstrated using a novel approach to the atomic force microscope. In the presence of an in-plane, low-frequency (0.1-5 Hz) alternating current electric field, we monitored and imaged the induced piezoelectric response normal to the film plane between two electrodes.

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