Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 13, Issue 5, Pages 628-633Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/13/5/314
Keywords
-
Ask authors/readers for more resources
In this paper we discuss newly developed microfabrication methods for liquid crystal polymer (LCP). LCP is a thermoplastic polymer made of aligned molecule chains with crystal-like spatial regularity. It exhibits unique electrical, physical and chemical properties, making it suitable for certain MEMS applications. MEMS-compatible fabrication processes such as metallization, plasma bulk etching and thermal bonding have been developed in our work. We demonstrated two micro sensor applications involving the LCP material.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available