Silicon sensors development for the CMS pixel system

The CMS experiment will operate at the Large Hadron Collider (LHC). A hybrid pixel detector located close to the interaction region of the colliding beams will provide high resolution tracking and vertex identification which will be crucial for b quark identification. Because of the radiation environment of the LHC, the performance of the sensors must be carefully evaluated up to a fluence of 6 x 10(14) n(eq) cm(-2). We expect that the sensors will be operated partially depleted during their operation at the LHC and we have implemented an n(+) on n sensor design. We have irradiated prototype,sensors to a dose of 1 x 10(15) n(eq) cm(-2). We present the results of our testing before and after irradiation. (C) 2003 Elsevier B.V. All rights reserved.