4.6 Article

An improved microstrip plasma for optical emission spectrometry of gaseous species

Journal

SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY
Volume 58, Issue 9, Pages 1585-1596

Publisher

PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/S0584-8547(03)00107-1

Keywords

microstrip plasma; microwave plasma; excitation temperatures; gaseous species; plasma-on-a-chip

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A modified compact 2.45 GHz microstrip plasma (MSP) operated with Ar as working gas at atmospheric pressure has been characterized and examined for its suitability for the determination of Hg as gaseous species by optical emission spectrometry. As a formerly described MSP the new device is provided on a sapphire substrate. The areas of plasma stability in terms of gas flow rates and microwave power for both MSPs with respect to plasma form and reflected power were investigated. Power levels of 5-40 W and Ar flow rates of 15-60 l/h were used. The modified MSP, which extends out of the channel in the sapphire substrate, was used for the recording of emission spectra for Hg vapor at different working conditions. Using optimized parameters a detection limit for Hg of less than 10 ng Hg/l Ar is obtained. The attainable excitation temperatures in the modified MSP at different microwave power were determined under the use of Fe as thermometric. species and introducing ferrocene into the plasma. They were found to be at the order of 6000-7000 K for a power of 10-40 W and a gas flow of 15 l/h. It was shown that the modified MSP source can be combined with both a conventional monochromator with photomultiplier detection and a miniaturized spectrometer with CCD detection, whereby space-angle limitations are not stringent. (C) 2003 Elsevier Science B.V. All rights reserved.

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