Journal
SENSORS AND ACTUATORS B-CHEMICAL
Volume 95, Issue 1-3, Pages 73-77Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/S0925-4005(03)00407-6
Keywords
oxygen sensor; undoped ceria; cerium oxide; thin film; semiconductor sensor; gas sensor
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The results of a study of the structure and the electrical properties of nanocrystalline cerium oxide sensor are presented. The relationship between the resistance of the thin film ceria and oxygen partial pressure is shown. In the range of oxygen concentration from 10 ppm to 100% the conductivity of the ceria follows (P-O2)(-1/4) behavior. The response time of the sensor and its cross-sensitivity to nitrogen dioxide and sulfur dioxide is investigated. (C) 2003 Elsevier B.V. All rights reserved.
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