Journal
IEEE TRANSACTIONS ON MAGNETICS
Volume 39, Issue 6, Pages 3607-3612Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TMAG.2003.816763
Keywords
electromagnetic forces; MAGMAS; MEMS; micro-actuators; microgenerators; scale reduction laws
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Magnetic interactions provide outstanding performances for powerful integrated micro-actuators. This paper explains how magnetic interactions involving permanent magnets, currents, and various magnetic materials remain very effective and even improve as dimensions are reduced. The technological problems that have slowed the development of, magnetic micro-actuators and systems (MAGMAS) are progressively being solved. As long as materials scientists continue to develop better thick-film patterned permanent magnets compatible with microsystem technologies, MAGMAS will have a promising future.
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