Journal
MATERIALS CHEMISTRY AND PHYSICS
Volume 82, Issue 2, Pages 331-334Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/S0254-0584(03)00139-1
Keywords
electrochemical techniques; aluminum oxide; dielectric properties; capacitance
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The roughness factor of barrier-type anodic oxide layer with low electrical conductivity was evaluated using electrochemical measurement in electrolyte with redox couple. To evaluate the surface roughness factor, the surface of barrier-type oxide layer was covered with thin layer of platinum by sputtering. From the limiting diffusion current method the surface roughness factor of barrier-type Al2O3 estimated to be 1.03. This factor is in good agreement with the results of the cross-sectional characteristics by using transmission electron microscope. (C) 2003 Elsevier Science B.V. All rights reserved.
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