Journal
MATERIALS LETTERS
Volume 57, Issue 30, Pages 4660-4666Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/S0167-577X(03)00380-X
Keywords
TiO2 film; sol-gel; optical property; crystal structure; calcination temperature; catalyst concentration
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TiO2 thin films were prepared on quartz glass by sol-gel process and their structural and optical properties were examined at various catalyst concentrations and calcination temperatures. The as-deposited TiO2 thin films are amorphous, and they transform into the anatase phase at 400-600 degreesC, and into the anatase-rutile phase at 800 degreesC, and further into the rutile phase at 1000 degreesC. The temperature of phase transformation is decreased with the concentration of catalyst HCl. The crystallite size of TiO2 thin films is increased with increasing calcination temperature and catalyst concentration. The secondary particles in the TiO2 thin films grow by intra-agglomerate densification below 800 degreesC, whereas they grow by inter-agglomerate densification above 800 degreesC. The deposited TiO2 thin films have high transparency in the visible range. The transmittance of the films calcined at 8,00 and 1000 degreesC are significantly reduced in the wavelength range of 300-800 nm due to the change of crystallite phase and, increased particle size. The refractive index of TiO2 thin films is increased with increasing calcination temperature and catalyst concentration. On the other hand, the porosity of TiO2 thin film is decreased. (C) 2003 Elsevier Science B.V. All rights reserved.
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