Journal
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
Volume 78, Issue 3, Pages 283-286Publisher
SPRINGER HEIDELBERG
DOI: 10.1007/s00339-003-2363-6
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We have developed a new method for aligning individual suspended single-walled carbon nanotubes (SWNTs) using a combination of the ac electrophoresis technique and electron beam lithography. A poly(methyl methacrylate) (PMMA) underpinning was used in the region between the Au electrodes to prevent the carbon nanotube (CNT) from falling down on to the substrate. O-2 plasma ashing was used to control the height of the underpinning PMMA layer so that it was same as that of the pre-defined electrodes. The biggest advantage of this method is that one can easily align the suspended nanostructure in a controllable manner. This method can also be applied to making suspended structures of organic materials that are sensitive to acid treatment. We measured the temperature-dependent I-V characteristics of the suspended SWNTs and found that most of the aligned SWNTs were metallic.
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