Journal
JOURNAL OF MATERIALS RESEARCH
Volume 19, Issue 2, Pages 429-438Publisher
CAMBRIDGE UNIV PRESS
DOI: 10.1557/jmr.2004.19.2.429
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The cathodic electrodeposition of molybdenum oxide thin films prepared from aqueous solutions containing iso-polymolybdates and peroxo-polymolybdates is described. Chronocoulometry, x-ray photoelectron spectroscopy, spectroelectrochemistry, and electrochemical quartz crystal microgravimetry were used to establish corresponding reaction mechanisms for films grown at different deposition potentials. Electrodeposition from acidified iso-polymolybdate solutions proceeds by the reduction of molybdic acid, whereas deposition from aqueous peroxo-based solutions involves the graded reduction of several solution components, primarily comprising molybdic acid and peroxo-polymolybdates. Careful regulation of the deposition potential allows for controlled growth of distinct molybdenum oxide compositions producing films with varied water content and valency.
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