In situ diagnostic methods for thin-film fabrication: utilization of heat radiation and light scattering

Deposition processes of Cu(In, Ga)Se-2 (CIGS) thin films were observed by informative and low-cost in situ monitoring means; the pyrometer technique, and the spectroscopic light-scattering (SLS) technique. Intensities of thermal radiation and scattered white light were profiled from outside the vacuum chamber during growth, using a monochromatic pyrometer and a small CCD spectrometer. The deposition process was studied by systematic variations of major process parameters of CIGS, such as the substrate temperature, Ga concentration and Se supply. Various film proper-ties, including the deposition speed, thickness, compositional ratios, surface roughness and precipitation of Cu-rich phases have been monitored in situ. Copyright (C) 2004 John Wiley Sons, Ltd.