Journal
SURFACE & COATINGS TECHNOLOGY
Volume 180, Issue -, Pages 621-626Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.surfcoat.2003.10.106
Keywords
carbon; carbon-nitride; overcoat; magnetic storage device; XANES; XPS; metallic and oxidized cobalt; highly resolved imaging XPS
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The thickness-dependent corrosion protection of carbon overcoats for magnetic hard disks can be analyzed by collecting X-ray absorption near edge structure (XANES) spectra at the Co L-3-edge. Co is the main constituent of the protected magnetic media underneath. The spectra of the Co absorption edge display a strong peak for pure metallic, non-oxidized Co. This peak splits up into several sub-structures for oxidized Co. Therefore, XANES spectra provide a straightforward method to determine the overcoat thickness, leading to closed coverage and corrosion protection of the underlying material. A similar approach was carried out by X-ray photoelectron spectroscopy (XPS). Standard a-C:N overcoats deposited by magnetron sputtering (MS) were compared to a-C overcoats deposited by a novel filtered high current pulsed arc source (HCA) using a highly resolved imaging XPS system providing the combined measurement of XANES and XPS spectra in the same field of view. We determined that the HCA deposited a-C overcoats provide a closed coverage down to a layer thickness of 1.4 nm, whereas standard MS a-C:N overcoats do not cover the magnetic film completely until a thickness of 2-3 nm is reached. (C) 2003 Elsevier B.V. All rights reserved.
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