Journal
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
Volume 201, Issue 5, Pages 888-893Publisher
WILEY-V C H VERLAG GMBH
DOI: 10.1002/pssa.200304369
Keywords
-
Ask authors/readers for more resources
A method to quantify the resolution of atomic force microscopy (AFM) probes using Fourier analysis of the AFM images is, proposed. The maximum detectable spatial frequency obtained from the power spectrum was used to estimate the lateral resolution. Carbon nanotube tips were successfully used to study very dense arrays of semiconductor nanostructures. In particular, accurate measurements of shallow facet angles were obtained, which are in perfect agreement with results obtained by two complementary techniques - High Resolution Transmission Electron Microscopy and Reflection High-Energy Electron Diffraction. (C) 2004 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available