Journal
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS
Volume 43, Issue 4B, Pages 2323-2325Publisher
JAPAN SOC APPLIED PHYSICS
DOI: 10.1143/JJAP.43.2323
Keywords
organic FET; pentacene; self-alignment
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Self-aligned organic field-effect transistors using the back-surface exposure method were investigated. Using the back-surface exposure method. source and drain electrodes were self-aligned to the gate electrode. The overlapping length of the gate-source and the gate-drain electrodes was as small as 0.8 mum. Excellent field-effect operation was obtained with small parasitic resistance, where the maximum field-effect mobility was 0.12 cm(2)/Vs. The on-off ratio was 10(4), threshold voltage was -1.0 V, mutual conductance was 1.8 mS and subthreshold slope was 0.5 V/decade. Combined with capacitance measurement, the estimated cutoff frequency was 0.18 MHz.
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