Journal
MICROELECTRONIC ENGINEERING
Volume 72, Issue 1-4, Pages 288-293Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.mee.2004.01.006
Keywords
high-k dielectrics; transition metal oxides; rare earth oxides; complex mixed oxides
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Spectroscopic studies of transition metal (Tm) and rare earth (Re) oxides, combined with ab initio theory, identify the band edge electronic structure of alternative high-k dielectrics. The lowest conduction band states are derived from anti-bonding transition metal d*-states with a pi symmetry and show strong final state effects. Applied to the complex Tm/Re mixed oxides of the general form ReTmO3, this approach identifies a novel way for obtaining separate and independent control of band gap energies and dielectric constants through local bonding arrangements in which Tin and Re atoms are nearest neighbors to the same oxygen atom. (C) 2004 Elsevier B.V. All rights reserved.
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