Journal
PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY
Volume 28, Issue 2, Pages 181-185Publisher
ELSEVIER SCIENCE INC
DOI: 10.1016/j.precisioneng.2003.08.003
Keywords
glass plate; press; damascene; circuit pattern; multi-layered electric circuit board
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The authors introduce a pressing/damascening replication process on glass plates. As a prototype replication, the 20 mum line-wide circuit pattern was experimented. A male-patterned tungsten carbide mold hot-pressed against a glass plate to replicate the female pattern on the glass. Then the copper was deposited on the pressed glass, and was polished flat to produce the same copper damascened pattern. Next the three-layered circuit board was stacked and fixed by hot-pressing with only 2 mum error in the line width. (C) 2003 Elsevier Inc. All rights reserved.
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