Journal
THIN SOLID FILMS
Volume 453, Issue -, Pages 537-541Publisher
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2003.11.109
Keywords
femtosecond laser techniques; ceramics; energy dispersive X-ray
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The interaction of fermosecond laser pulses in the near-infrared region with non-oxidic ceramics such as silicon carbide, SiC, a composite compound SiC-TiC-TiB2, and aluminium nitride, AIN, was investigated with respect to morphological changes. Multi-pulse irradiation resulted in negligible melting and debris. Most interesting was the occurrence of periodic structures (ripples). These self-assembled nanostructures showed an orientation perpendicular to the plane of polarization. All materials exhibited at least two different periodicities. Energy dispersive X-ray analysis (EDX) allowed correlating the chemical composition of the ceramic compound with the morphological nature of these ripples. Phenomena near the ablation threshold are discussed in terms of non-thermal melting processes. (C) 2003 Elsevier B.V. All rights reserved.
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