Multilayers, alloys, and complex profiles by pulsed laser deposition using a novel target geometry

A novel ablation target geometry is presented, whereby an ablation rod is divided into two or more sections and rapidly cyclically translated along its axis. In this manner, a wide range of film compositions can be achieved using the same target. The flexibility of this technique is demonstrated for the growth of quasicrystalline and complex metal oxide thin films. (C) 2003 Elsevier B.V. All rights reserved.