4.3 Article

Charging of micro-particles in plasma-dust interaction

Journal

INTERNATIONAL JOURNAL OF MASS SPECTROMETRY
Volume 233, Issue 1-3, Pages 51-60

Publisher

ELSEVIER
DOI: 10.1016/j.ijms.2003.10.018

Keywords

dusty plasmas; plasma-wall interactions; charging; plasma processing

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A microphysical description of the charging of dust grains in a plasma is presented. The model which is based on plasma-wall interaction processes predicts the dependence of the grain charge on the particle radius and on the particle temperature better than the commonly used assumptions of a spherical capacitor. The results of the model are compared with measurements of the particle charge which were performed in different discharge configurations. (C) 2004 Elsevier B.V. All rights reserved.

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