Journal
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS
Volume 43, Issue 4B, Pages L507-L509Publisher
INST PURE APPLIED PHYSICS
DOI: 10.1143/JJAP.43.L507
Keywords
hydrogen sensor; Mg2Ni; palladium; thin film; resistance; XPS
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Pd-capped Mg2Ni alloy thin films were prepared by DC magnetron sputtering using Mg, Ni and Pd targets, and their hydrogen sensing characteristics have been investigated. Pd-capped Mg2Ni films with thicknesses of 10 nm Pd and 40 nm Mg2Ni show a good hydrogen sensing property for hydrogen-containing air at room temperature. Their sensing range is from 0.01% to 10% hydrogen in air. These films are supposed to be candidates for low-cost room temperature hydrogen sensor.
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