4.7 Article Proceedings Paper

Radiofrequency glow-discharge devices for direct solid analysis

Journal

ANALYTICAL AND BIOANALYTICAL CHEMISTRY
Volume 379, Issue 1, Pages 17-29

Publisher

SPRINGER HEIDELBERG
DOI: 10.1007/s00216-004-2531-3

Keywords

radiofrequency glow-discharge device; direct solid analysis; atomic absorption spectrometry; optical emission spectrometry; mass spectrometry

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The enormous potential of radiofrequency glow discharges (rf-GD) as photon, atom, or ion sources, coupled to spectrometric techniques, for rapid direct analysis of almost any conductor, semiconductor, or insulating material with good in-depth resolution has been demonstrated world-wide. This outstanding performance has prompted a great effort to develop and characterise rf-GD for direct materials analysis in recent years. The state of the art of rf-GD coupled to atomic absorption spectrometry, optical emission spectrometry, and mass spectrometry for direct solid analysis is reviewed here. A description of the principles of operation of the rf-GD and attempts to model these discharges are also given. Rf-GD instrumentation, both developed at research laboratories and commercially available, is described. Several practical examples are given demonstrating the capabilities of these techniques for bulk and depth-profile analysis. Finally, the research gaps to be filled for full implementation of rf-GD spectrometric techniques in industry and research centres alike for materials science studies and technical development are discussed.

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