Journal
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS
Volume 10, Issue 3, Pages 435-439Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSTQE.2004.828490
Keywords
diffraction; grating; microelectromechanical devices; optical device fabrication; optical equalizers
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In this paper, device structure and measurements on a diffractive optical modulator fabricated using a elastomer layer are reported. The device structure is fairly simple with an inter-digitated bottom electrode, an elastomer layer, and a top electrode. Application of voltage to one of the bottom interdigitated electrodes causes an electrostrictive force, which, in turn, corrugates the elastomer layer. This method is used to create a configurable reflective phase grating that enables an analog control of the diffracted intensity. The major advantages of this method are the ease of fabrication and the simple device structure.
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