Journal
OPTICS EXPRESS
Volume 12, Issue 10, Pages 2120-2129Publisher
OPTICAL SOC AMER
DOI: 10.1364/OPEX.12.002120
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We present novel results obtained in the fabrication of high-aspect ratio micro-fluidic microstructures chemically etched from fused silica substrates locally exposed to femtosecond laser radiation. A volume sampling method to generate three-dimensional patterns is proposed and a systematic SEM-based analysis of the microstructure is presented. The results obtained gives new insights toward a better understanding of the femtosecond laser interaction with fused silica glass (a-SiO2). (C) 2004 Optical Society of America.
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