☆ 4.3 Article

Integrating microelectromechanical systems with integrated circuits

IEEE INSTRUMENTATION & MEASUREMENT MAGAZINE (2004)

Journal

IEEE INSTRUMENTATION & MEASUREMENT MAGAZINE

Volume 7, Issue 2, Pages 51-59

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC

DOI: 10.1109/MIM.2004.1304566

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Categories

Engineering, Electrical & Electronic Instruments & Instrumentation

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