Journal
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
Volume 219, Issue -, Pages 140-144Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.nimb.2004.01.042
Keywords
cross-section; nuclear reaction; nitrogen; RBS; Si3N4; charge exchange
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Recent progress in thin film techniques has made possible the fabrication of stable and pollution-free reference standards. Thin Si3N4 films (thickness 70 nm) were selected to measure the differential cross-sections of nuclear reactions induced by deuterons from 0.5 to 2 MeV. The absence of oxygen and carbon in the standard, as well as the stoichiometry, were checked beforehand by RBS. The differential cross-sections of the N-14(d,P-5)N-15, N-14(d,p(0))N-15, N-14(d,alpha(0))C-12 and N-14(d,alpha(1))C-12 reactions were measured for various experimental configurations. This paper presents two methods for cross-section characterization. One is based on the RBS spectrum with 0.8 MeV He-4(+) to calculate the concentration of nitrogen per cm(2) and the NRA spectrum to measure the cross-sections. This method requires two different experiments to be performed. The other method uses deuteron backscattering by N on the NRA spectrum itself. The second method requires only one experiment and consequently reduces uncertainty. The data resulting from these two methods are in agreement with each other and in agreement with the latest published values [Nucl. Instr. and Meth. B 170 (2000) 461]. However, we note a shift (of a factor 1.5 approximately) between our results and the reference data in the Handbook of Modern Ion Beam Materials Analysis (C) 2004 Elsevier B.V. All rights reserved.
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