Journal
APPLIED PHYSICS LETTERS
Volume 84, Issue 24, Pages 4953-4955Publisher
AMER INST PHYSICS
DOI: 10.1063/1.1760888
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Absolute atomic hydrogen and methyl radical production resulting from direct electron impact dissociative excitation of CH4 has been measured in pulsed discharge by two-photon allowed laser induced fluorescence. For 20 Torr pure methane discharge with 480 ns pulse duration, 4-6 kV voltage applied, and 6-11.5 mJ input electrical energy yield of 10-22x10(15) cm(-3) hydrogen atoms, i.e., up to 4.5% dissociation of CH4 is achieved by direct electron impact with 50% energy conversion efficiency. (C) 2004 American Institute of Physics.
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