Dielectric properties and electronic transitions of porous and nanostructured cerium oxide films

Cerium dioxide (CeO2) exhibits exceptional electronic properties such as optical transparency and high refractive index (n) and high dc dielectric constant (k). Therefore, it is an attractive material for ultra-thin gate oxide in CMOS technology, where high-k dielectrics are required. We study the electronic properties of nanostructured and porous cerium oxide (CeOx) films, 110-500 nm thick, grown on Si by electron beam evaporation (EBE) and ion beam assisted deposition (IBAD). The film microstructure and morphology (grain size, porosity, defect concentration, surface and interface roughness) are controlled by varying the process parameters appropriately. They have been studied by high-resolution and transmission electron microscopy (HRTEM). The optical properties have been studied by spectroscopic ellipsometry (SE) and k was determined by capacitance measurements. We have found that the values of k and n (1.6-2.5 depending on porosity) are affected by the electronic transitions, which are strongly correlated with the microstructure and morphology of the films. We investigate how the microstructure and morphology variations affect the absolute values of the dc dielectric constant and of the dielectric function at the UV-Vis and IR spectral regions. In addition, we investigate the very important role of the defects, which have the form of grain boundaries, trivalent Ce3+ and O vacancies. As a result we were able to tailor n and k of CeOx films controlling their porosity and defect density. (C) 2003 Elsevier B.V. All rights reserved.