Journal
NANO LETTERS
Volume 4, Issue 7, Pages 1333-1337Publisher
AMER CHEMICAL SOC
DOI: 10.1021/nl0494001
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Funding
- NHGRI NIH HHS [R01 HG002338-02, R01 HG002338] Funding Source: Medline
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Atomic layer deposition of alumina enhanced the molecule sensing characteristics of fabricated nanopores by fine-tuning their surface properties, reducing 1/f noise, neutralizing surface charge to favor capture of DNA and other negative polyelectrolytes, and controlling the diameter and aspect ratio of the pores with near single Angstrom precision. The control over the chemical and physical nature of the pore surface provided by atomic layer deposition produced a higher yield of functional nanopore detectors.
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