Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
Volume 22, Issue 4, Pages 1923-1930Publisher
A V S AMER INST PHYSICS
DOI: 10.1116/1.1771667
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A system has been designed to generate monodisperse, single crystal silicon nanoparticles. The particles are generated using a SiH4/H-2 mixture in a high density plasma. An aerodynamic lens assembly focuses and size selects the particles. A high voltage plate is used to accelerate the charged particles such that they can be injected into a high temperature annealing tube to be heated. The shape and structure of the particles are changed in the annealing tube. Single crystals are obtained. (C) 2004 American Vacuum Society.
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