Journal
APPLIED SURFACE SCIENCE
Volume 302, Issue -, Pages 74-78Publisher
ELSEVIER
DOI: 10.1016/j.apsusc.2013.12.066
Keywords
Laser annealing; Periodic structure; Nanoporous gold; Dealloying
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Gold films with periodic stripes of nanoporous structure are realized by using pulsed laser annealing in a mask projection arrangement in combination with a dealloying process. An Ag-Au alloy is first formed in the exposed areas of Ag/Au bi-layers by annealing, and then the Ag is removed from Ag-Au alloy by submerging in HNO3 solution and nanoporous gold is formed. The Ag top-layer in the unexposed areas of the Ag/Au bi-layers is also removed and the Au under-layer remains. Laser annealing is performed with 2 pulses and 10 pulses at different energy densities. Optimized laser annealing parameters for the 140 nm Ag/80 nm Au bi-layers is found with 10 pulses at fluences of 132 and 143 mj/cm(2). (C) 2013 Elsevier B.V. All rights reserved.
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