Dielectrophoretic assembly and integration of nanowire devices with functional CMOS operating circuitry

We present a novel platform for the development and deployment of nanosensors in integrated systems. The nanosensor technology is based on striped high aspect ratio cylindrical structures grown using porous membranes as templates. These nanostructures are manipulated using dielectrophoretic forces, allowing their individual assembly and characterization. This assembly also enables the development of mixed-mode integrated circuits that include readout, signal processing, and communications circuitry, as well as the requisite layout for the post-IC assembly of the nanostructures. We report on preliminary designs of such mixed mode systems whose layouts integrate dielectrophoretic assembly sites with a rudimentary resistance read-out circuitry. (C) 2004 Published by Elsevier B.V.