4.7 Article

Air-stable n-type doping of graphene from overlying Si3N4 film

Journal

APPLIED SURFACE SCIENCE
Volume 307, Issue -, Pages 712-715

Publisher

ELSEVIER SCIENCE BV
DOI: 10.1016/j.apsusc.2014.04.107

Keywords

Plasma enhanced chemical vapor; deposition; Graphene; Si-3 N-4; Dirac point; N-type doping

Funding

  1. National Natural Science Foundation of China [51372033, 51202022]
  2. Program for New Century Excellent Talents in University [NCET-10-0291]
  3. 111 Project [B13042]
  4. Specialized Research Fund for the Doctoral Program of Higher Education [20120185120011]
  5. International Science and Technology Cooperation Program of China [2012DFA51430]

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In this study, we report a facile method to obtain air-stable n-type graphene by plasma-enhanced chemical vapor depositing Si-3 N4 film on the surface of graphene. We have demonstrated that the overlying Si3N4 film can not only act as the penetration-barrier against H2O and O-2 adsorbed on the graphene surface, but also cause an effective n-type doping due to the amine groups at the interface of graphene/Si3N4. Furthermore, the studies reveal that the Dirac point of graphene can be modulated by the thickness of Si-3 N-4 film, which is due to competing effects of Si3N4-induced doping (n-type) and penetrating H2O (O-2)-induced doping (p-type). We expect this method to be used for obtaining stable n-type graphene field-effect transistors in air, which will be widely used in graphene electronic devices. (C) 2014 Elsevier B.V. All rights reserved.

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