Journal
APPLIED SURFACE SCIENCE
Volume 292, Issue -, Pages 219-224Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.apsusc.2013.11.119
Keywords
NZO; Pulsed laser deposition; Oxygen pressure; TCO
Categories
Funding
- Science and Technological Program for Dongguan's Higher Education, Science and Research, and Health Care Institutions [2011108102025]
- Major National Development Project of Scientific Instrument and Equipment, China [2012YQ1400511]
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Nb-doped zinc oxide (NZO) transparent conductive thin films with highly (0 0 2)-preferred orientation were deposited on glass substrates by pulsed laser deposition method in oxygen ambience under different oxygen pressures. The as-deposited films were characterized by X-ray diffraction (XRD), Field emission-scanning electron microscopy (FE-SEM), electrical and optical characterization techniques. It was found that a desirable amount of oxygen can reduce the related defect scattering and enhance the carrier mobility. The resistivity and average optical transmittance of the NZO thin films are of 10(-4) Omega cm and over 88%, respectively. The lowest electrical resistivity of the film is found to be about 4.37 x 10(-4) Omega cm. In addition, the influence of oxygen pressure on optical properties in NZO thin films was systematically studied as well. (C) 2013 Elsevier B.V. All rights reserved.
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