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Cantilever transducers as a platform for chemical and biological sensors

Journal

REVIEW OF SCIENTIFIC INSTRUMENTS
Volume 75, Issue 7, Pages 2229-2253

Publisher

AMER INST PHYSICS
DOI: 10.1063/1.1763252

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Since the late 1980s there have been spectacular developments in micromechanical or microelectro-mechanical (MEMS) systems which have enabled the exploration of transduction modes that involve mechanical energy and are based primarily on mechanical phenomena. As a result an innovative family of chemical and biological sensors has emerged. In this article, we discuss sensors with transducers in a form of cantilevers. While MEMS represents a diverse family of designs, devices with simple cantilever configurations are especially attractive as transducers for chemical and biological sensors. The review deals with four important aspects of cantilever transducers: (i) operation principles and models; (ii) microfabrication; (iii) figures of merit; and (iv) applications of cantilever sensors. We also provide a brief analysis of historical predecessors of the modem cantilever sensors. (C) 2004 American Institute of Physics.

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