Journal
APPLIED SURFACE SCIENCE
Volume 265, Issue -, Pages 865-869Publisher
ELSEVIER
DOI: 10.1016/j.apsusc.2012.11.135
Keywords
Laser ablation; Ultra short pulses; Diffractive optical element
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Funding
- Tekes - the Finnish Funding Agency for Technology and Innovation
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We have studied femtosecond ablation under sprayed thin water film and its influence and benefits compared with ablation in the air atmosphere. These have been studied in case of the hole and the groove ablation using IR femtosecond laser. Water enhances the ablation rate and in some situations it makes possible to ablate the holes with a higher aspect ratio. While ablating the grooves, the water spray allows using the high fluences without the generation of the self-organized structures. (C) 2012 Elsevier B.V. All rights reserved.
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